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产品名称: brooks智能软件质量流量计/控制器
产品型号: brooks智能软件质量流量计/控制器
产品展商: 大湖机械(中国)有限公司
简单介绍
brooks智能软件质量流量计/控制器 Analog Mass Flow Meters & Controllers The Brooks® line of analog thermal mass flow instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy and simple integration. * Years of field-proven reliability * Analog I/O allows for quick and easy system integration * Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability * Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes * Globally approved for a variety of service areas = Data Sheet = Instruction Manual (registration required) Analog Thermal Mass Flow Full Scale Max Pressure Max Temp Input/ Output Type Model Capacity Accuracy bar psig C F UHP Metal Seal Controller 5964 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc UHP Metal Seal Controller 5965 0 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc Metal Seal Controller 5850EM 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc Metal Seal Controller 5851EM 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter/Controller 5850E 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter/Controller 5851E 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter/Controller 5853E 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter 5860E 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter 5861E 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter 5863E 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc Elastomer Seal Meter/Controller 5850i 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA Elastomer Seal Meter/Controller 5851i 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA Elastomer Seal Meter/Controller 5853i 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA Elastomer Seal Meter 5860i 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA Elastomer Seal Meter 5861i 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA Elastomer Seal Meter 5863i 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA
 
brooks智能软件质量流量计/控制器的详细介绍

brooks智能软件质量流量计/控制器

 
Analog Mass Flow Meters & Controllers
The Brooks® line of analog thermal mass flow instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy and simple integration.
  • Years of field-proven reliability
  • Analog I/O allows for quick and easy system integration
  • Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
  • Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
  • Globally approved for a variety of service areas
   
   
= Data Sheet     = Instruction Manual (registration required)
 
 Analog Thermal Mass Flow
   
Full Scale
 
Max Pressure
Max Temp
Input/
Output
Type
Model
Capacity
Accuracy
bar
psig
C
F

UHP Metal Seal Controller 5964
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc

UHP Metal Seal Controller 5965
 
0 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc

Metal Seal Controller 5850EM
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc

Metal Seal Controller 5851EM
 
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal
Meter/Controller
5850E
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal
Meter/Controller
5851E
 
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal
Meter/Controller
5853E
 
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal Meter 5860E
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal Meter 5861E
 
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal Meter 5863E
 
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc

Elastomer Seal
Meter/Controller
5850i
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA

Elastomer Seal
Meter/Controller
5851i
 
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA

Elastomer Seal
Meter/Controller
5853i
 
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA

Elastomer Seal Meter 5860i
 
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA

Elastomer Seal Meter 5861i
 
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA

Elastomer Seal Meter 5863i
 
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA



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